Robot Linear Drive Heat Transfer

ABSTRACT

An apparatus including a movable arm; a robot drive connected to the movable arm; and a heat transfer system. The robot drive includes a first drive configured to extend and retract the movable arm and a second drive configured to move the movable arm and the first drive along a linear path. The heat transfer system includes a first heat transfer member on the base and a second heat transfer member, where the heat transfer system is configured to transfer heat from the first drive to the first heat transfer member and then from the first heat transfer member to the second heat transfer member. The first heat transfer member travels with the base, and the first heat transfer member moves relative to the second heat transfer member as the base moves relative to the slide.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a divisional patent application of application Ser.No. 14/938,292 filed Nov. 11, 2015, which is a divisional patentapplication of application Ser. No. 13/618,117 filed Sep. 14, 2012,which claims priority under 35 USC 119(e) on Provisional PatentApplication No. 61/627,052 filed Sep. 16, 2011 and Provisional PatentApplication No. 61/678,721 filed Aug. 2, 2012, which are herebyincorporated by reference in their entireties.

BACKGROUND Technical Field

The exemplary and, non-limiting embodiments relate generally to a robotand, more particularly, to robot for moving a substrate.

Brief Description of Prior Developments

Conventional manufacturing technologies for semiconductor integratedcircuits and flat panel displays often include processing of siliconwafers and glass panels, often referred to as substrates, in, fullyautomated vacuum cluster tools. A typical cluster tool may include acircular vacuum chamber with load locks and process modules connectedradially to the circumference of the chamber in a star pattern. The toolis typically serviced by a robotic manipulator (robot) which is locatednear the center of the chamber and cycles the substrates from the loadlocks through the process modules and back to the load locks. Anotherrobot may be located in an atmospheric transfer module which serves asan interface between the load locks of the vacuum chamber andstandardized load ports serviced, by an external transportation system.

SUMMARY

The following summary is merely intended to be exemplary. The summary isnot intended to limit the scope of the claims.

In accordance with one aspect, an example apparatus comprises a movablearm; a robot drive connected to the movable arm, where the robot drivecomprises a first drive configured to extend and retract the movable armand a second drive configured to move the movable arm and the firstdrive along a linear path, where the first drive comprises a rotarydrive which comprises a rotational axis, where the linear drivecomprises a base movably mounted on a slide, where the first drive ismounted on the base, and where the linear drive is configured to movethe base on the slide in a direction perpendicular to the rotationalaxis of the rotary drive; and a heat transfer system comprising a firstheat transfer member on the base and a second heat transfer member,where the heat transfer system is configured to transfer heat from thefirst drive to the first heat transfer member and then from the firstheat transfer member to the second heat transfer member, where the firstheat transfer member travels with the base, and where the first heattransfer member moves relative to the second heat transfer member as thebase moves relative to the slide.

In accordance with another aspect, an example apparatus comprises amovable arm; a robot drive connected to the movable arm, where the robotdrive comprises a first drive configured to extend and retract themovable arm and a second drive configured to move the movable arm andthe first drive along a linear path, where the first drive comprises arotary drive which comprises a rotational axis, where the linear drivecomprises a base movably mounted on a slide, where the first drive isconnected to the base, and where the linear drive is configured to movethe base in a direction orthogonal to the rotational axis of the rotarydrive; and a heat transfer system comprising a first heat tranafermember on the base and a second heat transfer member, where the heattransfer system is configured to transfer heat from the first drive tothe first heat transfer member and then from the first heat transfermember to the second heat transfer member, where the first heat transfermember moves relative to the second heat transfer member as the basemoves relative to the slide; and an inductive coupling configured toprovide an electrical power connection and/or a communication connectionto the robot drive, where the inductive coupling comprises a firstinductive coupling component on the base and a second inductive couplingcomponent, where the first inductive coupling component moves relativeto the second inductive coupling component as the base moves relative tothe slide.

In accordance with another aspect, an example apparatus comprises amovable arm; a robot drive connected to the movable arm, where the robotdrive comprises a first drive configured to extend and retract themovable arm and a second drive configured to move the movable arm andthe first drive along a linear path, where the first drive comprises arotary drive Which comprises a rotational axis, where the linear drivecomprises a base movable located on a slide, where the first drive isconnected to the base, and where the linear drive is configured to movethe base in a direct orthogonal to the rotational axis of the rotarydrive; and a heat transfer system comprising a first heat transfermember on the base and a second heat transfer member, where the heattransfer system is configured to transfer heat from the first drive tothe first heat transfer member and then from the first heat transfermember to the second heat transfer member, where the first heat transfermember travels with the base, where the first heat transfer member movesrelative to the second heat transfer member as the base moves relativeto the slide, where the heat transfer system further comprises at leastone enclosure at least partially surrounding at least one heatgenerating component of the robot drive, where the at least oneenclosure is configured to transfer heat from the at least one heatgenerating component to the first heat transfer member.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing aspects and other features are explained in the followingdescription, taken in connection with the accompanying drawings,wherein:

FIG. 1 is a schematic view of a substrate processing apparatus;

FIG. 2 is a top view of a substrate transport apparatus of the substrateprocessing apparatus shown in FIG. 1;

FIG. 3 is a schematic view illustrating a barrier between a vacuumcompatible module and an atmospheric module;

FIG. 4 is a prospective view of a communication/power flexure;

FIG. 5 is a prospective view of another communication/power flexure;

FIG. 6 is a perspective view of a cooling system;

FIG. 7 is a diagram illustrating components of the apparatus shown inFIG. 2;

FIG. 8 is a diagram illustrating a cooling system of the apparatus shownin FIG. 2;

FIG. 9 is a diagram illustrating some connections of components of theapparatus shown in FIG. 2;

FIG. 10 is a diagram illustrating an airtight enclosure of the apparatusshown in FIG. 2;

FIG. 11 is top view similar to FIG. 2 of an alternate substratetransport apparatus of the substrate processing apparatus shown in FIG.1;

FIG. 12 is a top view similar to FIG. 2 of another alternate substratetransport apparatus of the substrate processing apparatus shown in FIG.1;

FIG. 13 is a top view similar to FIG. 2 of another alternate substratetransport apparatus of the substrate processing apparatus shown in FIG.1;

FIG. 14 is a top view similar to FIG. 2 of another alternate substratetransport apparatus of the substrate processing apparatus shown in FIG.1;

FIG. 15 is a schematic top view of the apparatus of FIG. 14 in a vacuumchamber;

FIGS. 16A and 16B are top views of different types of end effectors;

FIG. 16C is a schematic top view of the arm of FIG. 2 with the endeffector of FIG. 16A in a vacuum chamber;

FIG. 17 is a schematic cross sectional diagram showing the coolingsystem of FIG. 8 attached to the apparatus of FIG. 12;

FIG. 18 is a schematic cross sectional diagram similar to FIG. 17 of analternate example embodiment;

FIG. 19 is schematic top view of an example substrate transportapparatus;

FIG. 20 is a schematic top view of an example substrate transportapparatus;

FIG. 21 is a schematic cross sectional view of the apparatus shown inFIG. 19 taken along line 21-21;

FIG. 22 is a schematic cross sectional view of the apparatus shown inFIG. 19 taken along line 22-22;

FIGS. 23-24 are schematic top views of an example substrate transportapparatus;

FIG. 25 is a schematic cross sectional view of the apparatus shown inFIGS. 23-24; and

FIGS. 26-30 are schematic top views of example substrate processingapparatus.

DETAILED DESCRIPTION OF EMBODIMENTS

Referring to FIG. 1, there is shown a schematic top plan view of anexample substrate processing apparatus 10 having a substrate transportapparatus 12. Although the present invention will be described withreference to the embodiments shown in the drawings, it should beunderstood that the present invention may be embodied in many forms ofalternative embodiments. In addition, any suitable size, shape or typeof materials or elements could be used.

In addition to the substrate transport apparatus 12, the substrateprocessing apparatus 10 includes multiple substrate processing chambers14 and substrate cassette elevators 16 connected to a vacuum chamber 15.The transport apparatus 12 is located, at least partially, in thechamber 15 and is adapted to transport planar substrates, such assemiconductor wafers or flat panel displays, between and/or among thechambers 14 and elevators 16. In alternate embodiments, the transportapparatus 12 could be used in any suitable type of substrate processingapparatus.

A conventional vacuum environment robotic manipulator typically includesa drive unit which houses all active components of the roboticmanipulator, e.g., actuators and sensors, and one or more arms, asdiscussed above, driven by the drive unit. The arm(s) are typicallypassive mechanisms, i.e., they do not include any active components,such as actuators and sensors. This is primarily due to difficultieswith out-gassing, power distribution and heat removal in vacuumenvironments.

In a conventional vacuum environment robotic manipulator, since thearm(s) of the robotic manipulators are passive mechanisms, the number ofindependently driven links is limited to the number of motion axesprovided by the drive unit and further constrained by the complexity oftransmission of the actuation torques to the individual links of thearm(s). This may limit the arm configurations used in practice to theones discussed above, which in turn may limit the reach and throughputperformance of the existing vacuum environment robotic manipulators.

Furthermore, while atmospheric-environment robots often utilize varioussubstrate grippers, vacuum-compatible robots typically hold thesubstrate subject to processing solely by means of frictional forcebetween the substrate and the robot end-effector. Since the inertialforce at the substrate must not exceed the holding force securing thesubstrate to the end-effector in order to prevent undesirable slippage,the acceleration of the substrate must be limited accordingly, resultingin limited throughput (number of substrates processed per hour) thetool. Therefore, there is a need for a gripper, such as an edge-clampingmechanism or an electrostatic hold-down arrangement, that wouldeliminate the acceleration constraint due to substrate slippage.Furthermore, it is desirable to place sensors on the robot end-effectorto assist with substrate alignment, or facilitate station teaching, orsimilar type operation.

Therefore, it is beneficial to supply power and signals to the arm(S)and end-effector(s) of a vacuum-compatible robot. Conventionalarrangements, such as slip-ring and rolling-contact rotary couplings orservice loops, which have been designed for atmospheric applications andsuccessfully utilized in atmospheric-environment robots, are difficultto employ vacuum applications due to performance (cold welding) andout-gassing issues.

In summary, since the arm(s) of the robotic manipulators are passivemechanisms, the number of independently driven links is limited to thenumber of motion axes provided by the drive unit and further constrainedby the complexity of transmission of the actuation torques to theindividual links of the arm(s), and the use of substrate gripping andsensing arrangements is virtually non-existent in vacuum environmentapplications. This limits the reach, throughput performance andsubstrate placement repeatability of the existing vacuum environmentrobotic manipulators. Therefore, it would be advantageous to provide arobotic system with active components, such as actuators and sensors,located within the vacuum environment or other non-atmosphericenvironment that the arm(s) of the robotic manipulator may operate in.

Referring also to FIG. 2, substrate transport apparatus 12 (orvacuum-compatible robot system) provides improved features overconventional apparatus. The substrate transport apparatus 12 includes adrive 18 and a frame 20. The frame 20 includes members including atleast two links 22, 24 which form an arm assembly 25 and an end effector26. The drive 18 has two rotary axes. The arm assembly 25 is coupled tothe drive 18. The arm assembly 25 may include a first link 22, a secondlink 24 and the end-effector 26. The first link 22 is attached directlyto a first rotary axis of the drive 18. The second link 24 is coupled tothe first link 22 through a first rotary joint 28. The end-effector 26is coupled to the second link 24 through a second rotary joint 30. Thesecond link 24 is driven through a belt/band drive which may include afirst pulley 34, attached to a second rotary axis of the drive 18, afirst belt/band 36 and a second pulley 38, attached to the second link24 of the arm assembly 25. The end-effector 26 is constrained to pointapproximately in a radial direction with respect to the drive 18 throughanother belt/band arrangement, which may include a third pulley 42,pivotably coupled to the first link 22, a second belt/band 44 and afourth pulley attached to the end-effector 26. In various differentexample embodiments, any suitable drive, actuator, sensor or otherwisemay provide features as disclosed herein; in any combination and/or asdisclosed in U.S. patent application Ser. No. ______, filed on the samedate herewith, based upon U.S. Provisional Patent Application No.61/627,030 filed Sep. 16, 2011 and U.S. Provisional Patent ApplicationNo. 61/683,297 filed Aug. 15, 2012, which are all hereby incorporated byreference in their entireties herein.

The third pulley 42 is phased with respect to the first link 22 of thearm assembly by a first actuator 48, which may adjust the orientation ofthe third pulley 42 relative to the first link 22 of the arm assemblywithin a given range. Preferably, the first actuator 48 may beself-locking, that is, it may not be back-driven when torques areapplied to the third pulley. For example, the first actuator 49 mayinclude an electric motor with a lead-screw mechanism or a worm-drivearrangement, a piezoelectric actuator, or any other suitable actuationarrangement. The first actuator 48 may also include a positionmeasurement device to determine angular orientation of the third pulley42 with respect to the first link 22 of the arm assembly. The activecomponents of the first actuator, such as the stator of an electricmotor for example, may be, or may not be, housed completely, partiallyor otherwise in an airtight vessel 50 and separated from the passivecomponents, such as the rotor of an electric motor, by a separationhairier. The first actuator 48 is connected to a cooling subsystems,such as the exemplary cooling subsystem discussed below.

The first actuator 48 is controlled by the first controller unit 52,which may be coupled to the first link 22 of the arm assembly. The firstcontroller unit 52 may be housed in the same airtight vessel 50 as thefirst actuator 48, or located in another airtight vessel (not shown).The first controller unit 52 is connected to the cooling subsystem, suchas one of the exemplary cooling subsystems described below for example.The first controller unit 52 may process signals provided by theposition sensing device in the first actuator 48 and provide controlsignals to the first actuator 48. For example, to energize windings ofan electrical motor incorporated the actuator. The first controller unit52 may receive power communicate with the robot controller 54 through apower distribution and communication subsystem as further describedbelow.

The power distribution and communication subsystem may includeelectrical rotary couplings 56, 57, 58 located at or associated witheach rotary joint of the robotic manipulator 25. The rotary couplings56, 57, 58 may transmit power from the robot controller 54 to the firstcontroller unit 52 and other active components of the arm assembly 25,such as a gripper 60 and sensors 62 on the end-effector 26. Examples ofelectrical rotary couplings in accordance with one or more embodimentsof the vacuum-compatible robot arm system are discussed below.

The end-effector 26 may feature an active substrate gripper 60, whichmay utilize, for example, an electrically actuated edge-clampingmechanism, an electrostatic hold-down arrangement, or similar typedevice. The gripper(s) may be connected to the power distribution andcommunication subsystem as well as the cooling subsystem of the robotarm assembly as further described below. The arm system according to theone or more embodiments may utilize rotary electrical couplings 56-58 totransmit electrical power and/or signals through various rotary joints.The electrical couplings 56-58 may be of continuous rotation type orlimited rotation type for example. The gripper may incorporate featuresas disclosed in U.S. Provisional patent application No. 61/629,838 filedNov. 29, 2011 entitled “Vacuum Compatible Robot Gripper” which is herebyincorporated by reference in its entirety. However, in other exampleembodiments, any suitable gripper(s) may be provided.

One example continuous rotation coupling may be based on an inductiveprinciple. As shown in FIG. 3, the exemplary continuous rotationcoupling 56 may include of an atmospheric module 64 and avacuum-compatible module 66 arranged so that the two modules caninteract with each other across a gap 68. A separation barrier 70 may bepresent in the gap to separate the environment in which the atmosphericmodule 64 resides from the environment in which the vacuum-compatiblemodule 66 resides. The two modules 64, 66 include one or more rotarytransformers. For transmission of power and/or signals from theatmospheric environment to the vacuum environment, the primary windingsof the rotary transformers may be located in the atmospheric module 64and the corresponding secondary windings may be located in thevacuum-compatible module 66. For transmission of signals from the vacuumenvironment to the atmospheric environment, the primary windings of therotary transformers may be located in the vacuum-compatible module 66and the corresponding secondary windings may be located in theatmospheric module 64. Typically, the atmospheric module resides in anatmospheric environment and the vacuum module resides in a vacuum orother non-atmospheric environment. The vacuum-compatible module 66 mayinclude an airtight vessel 72 that encapsulates the contents of thevacuum-compatible module, e.g., to prevent out-gassing. Thevacuum-compatible module 66 may be connected to the cooling subsystem ofthe robot arm system, such as the exemplary cooling subsystem describedbelow.

Another example of the continuous rotation coupling according to one ormore embodiments of this invention may combine inductive principle forpower transmission and wireless network based arrangement forcommunication.

One example of the limited-rotation flexure coupling is shown in FIG. 4.In this example, each power and/or communication signal is carried by aone or more conductors 73 (see FIG. 2); a portion of which is providedin a helical coil flexure 74. One end 76 of the helical coil flexure 74may be coupled, preferably through an insulator 78, to one component ofthe robot, and the other end 80 of the helical coil flexure 74 may becoupled, preferably through an insulator, to another component of therobot, where the two components may he coupled through one of the rotaryjoints. Multiple helical coil flexures 74 may be arranged at a rotaryjoint in a substantially coaxial manner to provide path for severalpower and/or communication signals. Individual helical coil flexures maybe wound in opposite directions so that the restoring forces associatedwith individual helical coil flexures are balanced as much as possibleregardless of the displacement of the rotary joint. Insulation cylinders82 may be utilized between individual helical coil flexures to eliminaterisk of shorts between neighboring helical coil flexures. For example,two helical coil flexures 74 are shown in FIG. 4 for clarity ofillustration. However, any suitable number of helical coil flexures maybe used, such as one or more than two.

Another example of the limited-rotation flexure coupling of thisinvention is shown in FIG. 5. In this example, each power and/orcommunication signal may be carried by a spiral coil flexure 74′. Two ofthe spiral coil flexure 74′ are shown in FIG. 5. One end 76′ of thespiral coil flexure may be coupled, preferably through an insulator, toone component of the robot, and the other end 80′ of the spiral coilflexure may be coupled, preferably through an insulator, to anothercomponent of the robot, where the two components may be coupled througha rotary joint. Multiple spiral coil flexures may be stacked to providepath for several power and/or communication signals. Individual spiralcoil flexures may be wound in opposite directions so that the springforces associated with individual spiral coil flexures are balanced asmuch as possible regardless of the displacement of the rotary joint.Insulation disks may be utilized between individual spiral coil flexuresto eliminate risk of shorts between neighboring spiral coil flexures.Although two spiral coil flexures are shown in FIG. 5 for clarity ofillustration, any suitable number of spiral coil flexures may be used.

The number of helical and spiral coil flexures utilizes in a singlerotary coupling may relate to the number of power and communicationsignals transmitted through the rotary joint. A single signal may bedistributed among multiple helical and spiral coil flexures to reducecurrent density or for redundancy purposes.

The purpose of the cooling subsystem that may be used in accordance withthe vacuum-compatible robot arm assembly is to remove the heat generatedby active components incorporated into the robot arm assembly which isdifficult in vacuum compared to atmospheric application due to the lackof convection through the surrounding air. Heat conduction is alsolimited due to a long pass from the sources of the heat to the driveunit, and radiation provides limited effect at low temperatures.

For example, the cooling subsystem that may be used with thevacuum-compatible robot arm system may include a heat sink which may beconnected to an active component generating heat, a radiator, which maybe exposed to the outside of the robot arm assembly, and athermoelectric cooling device connected to the heat sink and theradiator. FIG. 6 shows an example of a thermoelectric cooling device 84may be a solid-state active heat pump, which transfers heat from theheat sink side (cold side) 86 of the device to the radiator side (hotside) 88 against the temperature gradient (from cold to hot), withconsumption of electrical energy. The main advantages of thethermoelectric cooling device are its lack of moving parts orcirculating liquid, and its small size and flexible shape (form factor).

Alternatively, the cooling subsystem May utilize any suitable heat pump,a fluid, either liquid or gas, circulating through heat sinks connectedto active, heat-generating components in the arm assembly and eitherexhausted from the system or fed into radiators, preferably built intothe robot drive unit, which may be exposed to the surroundingatmosphere. The fluid may be routed through the joints of the robotsystem in vacuum-compatible houses arranged in a manner similar to theflexure shown in FIGS. 4 and 5.

Referring also to FIGS. 7 and 8, the substrate transport apparatus 12 isshown in different schematic diagrams. Although the substrate transportapparatus 12 is described with respect to a vacuum robot, any suitablesubstrate transport apparatus; atmospheric or otherwise may be providedhaving features as disclosed substrate transport apparatus 12 hascontroller 54, drive unit 18 and arm 25, and is configured to transportsubstrate S. Controller 54 may have a processor, memory and poweramplifiers or otherwise. Arm 25 is shown as a SCARA type arm and drivenby drive unit 18. Although substrate transport apparatus 12 is describedwith respect to a two link arm, any suitable number of links may beprovided. Further, any suitable number of arms may be provided. Further,any combination of rotary and/or linear axis may be provided on anysuitable arm.

In the embodiment shown, arm 25 has three rotary axes 90, 92, 94.Directly coupled to each axis is a position detection device 96, 98, 100respectively. The position detection devices may be optical, inductiveor any suitable position detection devices. The position detectiondevices 96, 98, 100 may be incremental, absolute or a combination ofincremental and absolute. Position detection devices 96, 98, 100 may beused in combination with additional position detection devices withindriven axes of drive 18. Position detection devices 96, 98, 100interface with controller 54 such that the positions of joints 92, 94,96 are known; as opposed to robot drives not having position detectiondevices directly at the joint. Alternately, lees than all the joints mayhave position detection devices. Position detection devices 96, 98, 100may interface with controller 54 with signals routed through the arm anddrive and with the signals being electrical, optical or otherwise.Alternately, wireless or other suitable noncontact communication may beprovided. Here, hysteresis is not a factor in the position accuracy ofthe substrate transport apparatus 12 given the direct position detectionof each joint.

Drive 18 may further contain motors and additional position detectiondevice(s) where controller 54 interfaces with drive 18 and positiondetection devices 96, 98, 100 and utilizes a control algorithm tominimize vibration at payload S and maximize position repeatability uponpicking and placing payload S. Temperature detection devices 102, 104,106 may further be coupled to each link 22, 24, 26 to detect atemperature of one or more portions of each link. Temperature detectiondevices 102, 104, 106 further may be connected to controller 54 andthermal effects, such as thermal expansion or thermal based deflectionmay be factored into determining the location of the end effector 26. Inaddition to, or as an alternative to, temperature detection devices 102,104, 106, vibration detection devices 108 and/or deflection detectiondevices 110, connected to the controller 54, may be provided such thatvibration may be monitored and deflection may be factored intopositioning and smoothness. In alternate example embodiments, any of thedevices may be fastened to any suitable component, and may or may not beheat sunk. In alternate aspects, each device may be coupled to one ormore controllers, such as 52 for example, within one or more links.

Referring also to FIG. 8, cooling subsystem of the substrate transportapparatus 12 of FIG. 2 is shown. The drive 18 is a two axis drive. Thedrive 18 has a vertical drive 120 and a bellows 122, and is coupled tovacuum chamber 15. The drive 18 further has rotary drive 126, forexample, having a stator coupled to base 128 and bellows 122. Rotarydrive 126 directly rotates link 22, and may have a gear driven ordirectly driven motor, a position encoder and a power coupling where thepower coupling may be a contactless rotary power coupling or anysuitable power coupling providing power to link 22. Here, the powercoupling may be an contactless inductive transformer where power and; orcommunications may be fed in a contactless manner. Alternately, powerand/or data may be transmitted with a contact based or other suitableslip ring or coupling. Drive 18 further has contactless optical feedthrough 130 having first and second fiber optic channels 132, 134 thatfeed high speed communication to controller(s) 52 in link 22. Here,controllers 52 may have optic to ethercat or other suitable conversiondevices. Alternately, the conversion device and feed through 130 may beinductive, for example, a coupler that transmits both power and highfrequency signals or data, such as CAN or otherwise and used incombination with wires, flexures or otherwise.

A suitable contactless optical feed through may utilize stationary grinlenses and stationary mirrors. An example of such feed through isprovided by Moog Components Group, however, adapted for vacuum use.Alternately, any suitable coupling or feed through may be provided.Here, contactless fiber optic high speed communication coupled withcontactless rotary power provide controller(s) 52 that which isnecessary to drive arm 25. In addition to the high speed communicationcoupling, a non-contact inductive power coupling may be provided. Drive18 further has heat sink 140 or 84 in atmosphere and may havethermoelectric cooler 142 in vacuum or atmosphere. Radiation sink 144 iscoupled to base 128 where radiation sink 144 may have a series ofconcentric tubes 145 having high emissivity. Similarly, radiation sink146 is coupled to thermoelectric cooler 148 which in turn is coupled tothe body of link 22. Radiation sink 146 has a series of concentric tubes147 having high emissivity and interleaved with the tubes 145 of sink144. Here, coolers 142, 148 act to pump heat from the body of link 22through the radiation cooling coupling 144, 146 and to be dissipatedusing sink 140.

Similarly, any joint may utilize such a thermal coupling. As analternative, any suitable heat pump may be provided, for example, aphase change heat pump, that cools an active component and heats anysuitable radiator to considerably higher temperature. This allows for amore effective heat transfer using a smaller surface area as the amountof radiated heat depends on the fourth power of the temperature.Alternately, heat, may be radiated to the outside of the arm as opposedto cooled heat sinks or through a series of thermal couplings, forexample, the prior described mechanism may be suitable. Alternately,closed-loop cooling circuits may be provided within individual sectionsof the robot, such as within the links of the arm. As an example, thesecircuits may be heat pumps similar to those used in computers where theheat pump (s) may be completely sealed with substantially no leaks orout-gassing. Alternatively, it alternative example embodiments, noactive cooling or cooling accommodations may be provided.

Coupling 144, 146 may be made from coated aluminum, for example withaluminum nitride ceramic or otherwise. Alternately, any suitablematerial may be provided. Module(s) 136 may be thermally sunk to cooler148 or the housing or body of link 22. Module(s) 136 may have controland motor drive circuitry, position encoding read head(s), inputs oroutputs for external devices such as thermoelectric cooler 148 or otherread heads and edge grip actuators or otherwise.

For example, referring also to FIG. 9, encoder 150 may be directlycoupled to the wrist joint 30 associated with end effector 26 with aread head interfacing with module 52. Similarly, edge detection devicesor edge grip or edge location devices 62, 60 may be coupled to endeffector 26 and interfacing with module 52. In the disclosed embodiment,encoders may be provided at some or each joint, motors may be providedat some or each joint, the combination of motors, encoders andcontrollers may be provided at some or each joint. In alternate aspects,components within module(s) 52 or otherwise may be exposed,encapsulated, encapsulated within a sealed metal enclosure, encapsulatedwithin the body of link 22, encapsulated within a partial metalenclosure or combination thereof. Power and communication may be bycable and stationary feed through, contactless magnetic slip ring,contact based slip rings, through isolated bearing(s), flexures orotherwise or combinations thereof. Thermal sinking may be by radiationcooling, or by convection and conduction, for example, where a coolingmedium is passed through a feed through; either stationary or rotary. Inalternate aspects, one or more axes may be provided with a feed through,for example, ferrofluidic or other suitable seal. In alternate aspects,more links, for example concentric with or offset from drive 18 may beprovided having one, more or all independent axes of motion.Additionally, more or less cooling may be provided, for example, whereone or more thermoelectric coolers may not be provided or whereadditional thermoelectric coolers may be provided. Further, a heat pumpmay be provided to transfer heat from one portion of the arm or drive toanother for dissipation.

Referring also to FIG. 10, the airtight vessel or enclosure 50 is shown.In this example the airtight enclosure comprises the actuator 48, thecontrol unit 52 and at least, part of the sensor 98 therein. In analternate example, one or more of these components might not beprovided. Each component 48, 52, 98 have power and/or communicationconductors 73A, 73B, 73C which extend through the airtight enclosure 50into the conductor 73, such as through a seal 75 for example. Theconductors 73A, 73B, 73C may be electrical and/or optical. The enclosure50 protects the inside of the vacuum chamber 15 from any gas orcontaminant from the components 48, 52, 98 which otherwise mightcontaminate the vacuum enclosure 15. In alternative alternate exampleembodiments, the airtight enclosure may or may not be provided. Inalternative alternate example embodiments, the enclosure may onlyenclose a portion of a given device(s). For example, a portion of amotor or a portion of a sensor may be exposed to vacuum, or the entiremotor or sensor may be exposed, or the entire motor or sensor may besealed in the enclosure. This applies for any type of device which mightbe enclosed in an airtight enclosure.

Referring also to FIG. 11, another example embodiment of thevacuum-compatible robot arm system is shown having a single arm with twolinks 22, 24 and a pivoting end-effector 26. In this example, the robotsystem may include a drive unit with at least two rotary axes and an armassembly coupled to the drive unit. The arm assembly may include a firstlink 22, a second link 24 and an end-effector 26, where the first linkmay be attached directly to a first rotary axis of the drive unit 18,the second link 24 may be coupled to the first link through a firstrotary joint, and the end-effector may be coupled to the second linkthrough a second rotary joint. The second link 24 may be driven througha belt/band drive comprising a first pulley which may be attached to asecond rotary axis of the drive unit 18, a first, belt/band 36 and asecond pulley 38, which may be attached to the second link of the armassembly.

The end-effector 26 may be actuated ay a first actuator 48, which maycontrol the orientation of the end-effector 26 relative to the secondlink 24 of the arm assembly. For example, the first actuator 48 mayinclude an electric motor, a piezoelectric actuator, or any othersuitable actuation arrangement. The first actuator 48 may also include aposition measurement device 100 to determine angular orientation of theend-effector 26 with respect to the second link 24 of the arm assembly.The active components of the first actuator, e.g., the stator of anelectric motor, may be housed in an airtight vessel 50 and separatedfrom the passive components, such as the rotor of an electric motor, bya separation barrier. The first actuator may be connected to a coolingsubsystem, such as the cooling described above.

The first actuator 48 may be controlled by the first controller unit 52,which may be coupled to the second link of the arm assembly. The firstcontroller unit may be housed in the same airtight vessel 50 as thefirst actuator or located in another airtight vessel. The firstcontroller unit 52 may be connected to a cooling subsystem, such as theexample cooling subsystem described above. The first controller unit 52may process signals provided by the position sensing device 100 in thefirst actuator and provide control signals to the first actuator 48,e.g., energize windings of an electrical motor incorporated into theactuator. The first controller unit may receive power and communicatewith the robot controller 54 through a power distribution andcommunication subsystem 73.

The power distribution and communication subsystem may includeelectrical rotary couplings located at or associated with each rotaryjoint of the robotic manipulator. The rotary couplings may transmitpower from the robot controller to the first controller unit and otheractive components of the arm assembly, such as a gripper and sensors onthe end-effector.

Another example embodiment of the vacuum-compatible robot arm system isshown in FIG. 12. In this example, the robot system may include of adrive unit 18 with at least two rotary axes and an arm assembly 1225coupled to the drive unit. The arm assembly may include a first link 22,a second link 24 and two end-effectors 26A, 26B, often referred to asthe first end-effector and the second end-effector. The first link 22may be attached directly to a first rotary axis of the drive unit 18,the second link 24 may be coupled to the first link through a firstrotary joint 28, and the first and second end-effectors 26A, 26B may becoupled to the second link 24 through a second rotary joint 30 and athird rotary joint 31, respectively. The second link 24 may be driventhrough a belt/band drive comprising a first pulley 34, which may beattached to a second rotary axis of the drive unit, a first belt/band 36and a second pulley 38, which may be attached to the second link 24 ofthe arm assembly 1225.

The first end-effector 26A may be actuated by a first actuator 48A,which may control the orientation of the first end-effector relative tothe Second link of the arm assembly. Similarly, the second end-effector26B may be actuated by a second actuator 48B, which may control theorientation of the second end-effector 26B relative to the second link24 of the arm assembly. For example, the first and second actuators 48A,48B may include an electric motor, a piezoelectric actuator, or anyother suitable actuation arrangement. The first and second actuator 48A,48B may also include a position measurement device to determine angularorientation of the corresponding end-effector with respect to the secondlink of the arm assembly. The active components of the first and secondactuators, e.g., the stator of an electric motor, may be housed in anairtight vessel 50 and separated from the passive components, such asthe rotor of an electric motor, by a separation barrier. A singleairtight vessel may be used for both actuators 48A, 48B or,alternatively, each actuator may be housed in its own airtight vessel.The first and second actuators may be connected to a cooling subsystem,such as the exemplary cooling subsystem described above.

The first and second actuators 48A, 48B may be controlled by the firstcontroller Unit 52, which may be coupled to the second link of the armassembly. The first controller unit may be housed in the same airtightvessel 50 as the first and second actuators or located in anotherairtight vessel. The first controller unit may be connected to a coolingsubsystem, such as the exemplary cooling subsystem discussed above. Thefirst controller unit 52 may process signals provided by the positionsensing devices in the first and second actuators, and provide controlsignals to the first and second actuators, for instance, energizewindings of electrical motors incorporated into the actuators. The firstcontroller unit may receive power and communicate with the robotcontroller through a power distribution and communication subsystem.

The power distribution and communication subsystem may includeelectrical rotary couplings located at or associated with each rotaryjoint of the robotic manipulator. The rotary couplings may transmitpower from the robot controller to the first controller unit and otheractive components of the arm assembly, such as a gripper and sensors onthe end-effector. Alternatively, two separate controller units may beused; one for the first actuator 48A and the other for the secondactuator 48B.

Another embodiment of the vacuum-compatible robot arm system of thisinvention is shown in FIG. 13. In this example, the robot systemconsists of a drive unit 1318 with at least three rotary axes and an armassembly 1325 coupled to the drive unit. The arm assembly 1325 mayinclude of a first link 1322, a second link 1324, a third link 1326 andan end-effector 26. The first link 1322 may be attached directly to afirst rotary axis of the drive unit, the second link 1324 may be coupledto the first link through a first rotary joint, the third link 1326 maybe coupled to the second link via a second rotary joint, and theend-effector 26 may be coupled to the third link through a third rotaryjoint. The second link 1324 may be driven through a belt/band drivecomprising a first pulley 1334, which may be attached to a second rotaryaxis of the drive unit 1318, a first belt/band 1336 and a second pulley1338, which may be attached to the second link 1324 of the arm assembly.The third link 1326 may be driven through a two-stage belt/band drivefrom a third rotary axis of the drive unit. The first stage of thebelt/band drive may include of pulley 1340, pulley 1342 and belt/band1344, and the second stage of the belt/band drive may comprise pulley1346, pulley 1348 and belt/band 1350. Pulley 1340 may be driven directlyby the third rotary axis of the drive unit 1313, pulleys 1338 and 1346may be coupled together, and pulley 1348 may be attached to the thirdlink 1326 of the arm assembly.

The end-effector 26 may be actuated by a first actuator 48, which maycontrol the orientation of the end-effector relative to the third linkof the arm assembly. For example, the first actuator may include anelectric motor, a piezoelectric actuator or any other suitable actuationarrangement. The first actuator may also include a position measurementdevice 100 to determine angular orientation of the end-effector withrespect to the third link of the arm assembly. The active components ofthe first actuator, e.g., the stator of an electric motor, may be housedin an airtight vessel 50 and separated from the passive components, suchas the rotor of an electric motor, by a separation barrier. The firstactuator 48 may be connected to a cooling subsystem, such as theexemplary cooling subsystem discussed above.

The first actuator 48 may be controlled by the first controller unit 52,which may be coupled to the third link of the arm assembly. The firstcontroller unit may be housed in the same airtight vessel 50 as thefirst actuator or located in another airtight vessel. The firstcontroller unit 52 may he connected to a cooling subsystem, such as theexemplary cooling subsystem described above for example. The firstcontroller unit 52 may process signals provided by the position sensingdevice 100 in the first actuator and Provide control signals to thefirst actuator 48, e.g., energize windings of an electrical motorincorporated into the actuator. The first controller unit 52 may receivepower and communicate with the robot controller through a powerdistribution and communication subsystem 73.

The power distribution and communication subsystem 73 may includeelectrical rotary couplings located at or associated with each rotaryjoint of the robotic manipulator. The rotary couplings may transmitpower from the robot controller to the first controller unit and otheractive components of the arm assembly, such as a gripper and sensors onthe end-effector.

As an alternative embodiment of the arm assembly shown in FIG. 13, thethird link 1326 of the arm assembly may be actuated by an actuatorincorporated into the second link 1324, which may control theorientation of the third link 1326 relative to the second link 1324 ofthe arm assembly. For example, the actuator may include an electricmotor, a piezoelectric actuator, or any other suitable actuationarrangement. The actuator may also include a position measurement deviceto determine angular orientation of the third link with respect to thesecond link of the arm assembly. The active components of the actuator,e.g., the stator of an electric motor, may be housed in an airtightvessel and separated from the passive components, such as the rotor ofan electric motor, by a separation barrier. The actuator may beconnected to a cooling subsystem.

As yet another alternative embodiment of the arm assembly of FIG. 13,the third link 1326 of the arm assembly may be actuated by an actuatorincorporated into the third link 1326, which may control the orientationof the third link 1326 relative to the second link 1324 of the armassembly.

Yet another example embodiment of the vacuum-compatible robot arm systemis shown in FIGS. 14 and 15. In this example, the robot system mayinclude of a drive unit 1318 with at least three rotary axes and an armassembly 1325 coupled to the drive unit. The arm assembly may include ofa first link 1322, a second link 1324, a third link 1326 and twoend-effectors 26A, 26B, often referred to as the first end-effector andsecond end-effector. The first link 1322 may be attached directly to afirst rotary axis of the drive unit, the second link 1324 may be coupledto the first link through a first rotary joint, the third link 1326 maybe coupled to the second link via a second rotary joint, and the firstand second end-effectors 26A, 26B may be coupled to the third linkthrough a third rotary joint and a fourth rotary joint, respectively.

The first end-effector 16A may be actuated by a first actuator 48A,which may control the orientation of the first end-effector relative tothe third link of the arm assembly. Similarly, the second end-effector26B may be actuated by a second actuator 4818, which may control theorientation of the second end-effector relative to the third link of thearm assembly. For example, the first and second actuators may include anelectric motor, a piezoelectric actuator, or any other suitableactuation arrangement. The first and second actuator may also include aposition measurement device to determine angular orientation of thecorresponding end-effector with respect to the third link of the armassembly. The active components of the first and second actuators, e.g.,the stator of an electric motor, may be housed in an airtight vessel andseparated from the passive components, such as the rotor of an electricmotor, by a separation barrier. A single airtight vessel may be used forboth actuators or, alternatively, each actuator may be housed in its ownairtight vessel. The, first and second actuators may be connected to acooling subsystem.

The first and second actuators 48A, 48B may be controlled by the firstcontroller unit 52, which may be coupled to the third link of the armassembly. The first controller unit may be housed in the same airtightvessel 50 as the first and second actuators or located in anotherairtight vessel. The first controller unit may be connected to a coolingsubsystem as described above. The first controller unit 52 may processsignals provided by the position sensing devices in the first and secondactuators, and provide control signals to the first and secondactuators, e.g., energize windings of electrical motors incorporatedinto the actuators. The first controller unit 52 may receive power andcommunicate with the robot controller through a power distribution andcommunication subsystem 73.

The power distribution and communication subsystem may includeelectrical rotary couplings located at or associated with each rotaryjoint of the robotic manipulator. The rotary couplings may transmitpower from the robot controller to the first controller unit and otheractive components of the arm assembly, such as a grippers and sensors onthe end-effectors. Alternatively, two separate controller units may beused, one for the first actuator and the other for the second actuator.

As another alternative embodiment of the arm assembly of FIG. 14, thethird link of the arm assembly may be actuated by an actuatorincorporated into the second link, which may control the orientation ofthe third link relative to the second link of the arm assembly. As anexample, the actuator may include an electric motor, a piezoelectricactuator or any other suitable actuation arrangement. The actuator mayalso include a position measurement device to determine angularorientation of the third link with respect to the second link of the armassembly. The active components of the actuator, e.g., the stator of anelectric motor, may be housed in an airtight vessel and separated fromthe passive components, such as the rotor of an electric motor, by aseparation barrier. The actuator may be connected to a coolingsubsystem, such as described above.

As yet another alternative embodiment of the arm assembly of FIG. 14,the third link of the arm assembly may be actuated by an actuatorincorporated into the third link, which may control the orientation ofthe third link relative to the second link of the arm assembly. Forexample, the actuator may include an electric motor, a piezoelectricactuator or any other suitable actuation arrangement. The actuator mayalso include a position measurement device to determine angularorientation of the third link with respect to the second link of the armassembly. The active components of the actuator, e.g., the stator of anelectric motor, may be housed in an airtight vessel and separated fromthe passive components, such as the rotor of an electric motor, by aseparation barrier. The actuator may be connected to a coolingsubsystem, such as the exemplary cooling subsystem discussed above. FIG.15 shows the assembly 1325 in an apparatus 1510 having process modules14 and a load lock 16.

As a further example embodiment of some features, the arrangements forend-effector phasing and actuation discussed above may be applied todual-arm robotic manipulators. The arrangements for end-effector phasingmay be applied to both arms/end-effectors of the dual-arm roboticmanipulators or to one of the two arms/end-effectors of the dual-armrobotic manipulators.

The exemplary arm assemblies discussed above may utilize dual-substrateside-by-side end-effectors, as shown in FIGS. 16A, 16B and 16C. In oneexample, the dual-substrate side-by-side end-effector 1626 may compriseof two substrate holders 1628A, 1628B that are connected in asubstantially rigid manner. In another example, the two substrateholders 1628D, 1628E may be arranged in a movable manner so that therelative distance between the two substrate holders and/or the relativeorientation of the substrate holders may be adjusted in an activemanner. FIG. 16C shows a robot arm assembly with the arm 1626 being usedin an apparatus having vacuum chamber 1615, process modules 1614, andload locks 1616.

Referring also to FIG. 17, a schematic diagram of the drive 18 andcooling system of FIG. 8 is shown with the arm 1225 of FIG. 12. Thepower coupling may be a contactless inductive transformer where powerand/or communications may be fed in a contactless manner. Alternately,power and/or data may be transmitted with a contact based or othersuitable slip ring or coupling. Contactless optical feed through 130having first and second fiber optic channels 132, 134 that feed highspeed communication to controller(s) 136 in link 22. Here, controllers136 may have optic to ethercat or other suitable conversion devices 138.Alternately, device 138 and feed through 130 may be inductive, forexample, a coupler that transmits both power and high frequency Signalsor data, such as CAN or otherwise and used in combination with wires,flexures or otherwise. A suitable contactless optical feed through mayutilize stationary grin lenses and stationary mirrors. An example ofsuch feed through is provided by Moog Components Group however adaptedfor vacuum use. Alternately, any suitable coupling or feed through maybe provided. Here, contactless fiber optic high speed communicationcoupled with contactless rotary power provide controller(s) 136 thatwhich is necessary to drive arm. In addition to the high speedcommunication coupling, a non-contact inductive power coupling may beprovided. Module(s) 136 may have control and motor drive circuitry,position encoding read head(s), inputs or outputs for external devicessuch as thermoelectric cooler 148 or other read heads and edge gripactuators or otherwise. For example, encoders 150, 152 may he directlycoupled to wrist joints associated with end effectors 26A, 26B with readheads interfacing with module 136. Similarly, edge detection devices oredge grip or edge location devices 154, 156 may be coupled to, endeffectors 26A, 26B and interfacing with module 136.

In the disclosed embodiment, encoders may be provided at some or eachjoint, motors may be provided at some of or each joint, the combinationof motors, encoders and controllers may be provided at some of or eachjoint. In alternate aspects, components within module(s) 136 may beexposed, encapsulated, encapsulated within a sealed metal enclosure,encapsulated within the body of arm 112, encapsulated within a partialmetal enclosure or combination thereof. Power and communication may beby cable and stationary feed through, contactless magnetic slip ring,contact based slip rings, through isolated bearing(s), flexures orotherwise or combinations thereof. Thermal sinking may be by radiationcooling, or by convection and conduction, for example, where a coolingmedium is passed through a feed through; either stationary or rotary. Inalternate aspects, one or more axes may be provided with a feed through,for example, ferrofluidic or other suitable seal. In alternate aspects,more arms, for example concentric with or offset from drive may beprovided having one, more or all independent axes of motion.Additionally, more or less cooling may be provided, for example, whereone or more thermoelectric coolers may not be provided or whereadditional thermoelectric coolers may be provided. Further, a heat pumpmay be provided to transfer heat from one portion of the arm or drive toanother for dissipation.

Referring also to FIG. 18, a schematic diagram of a transport apparatusis shown having a rotary and vertical drive with an optical feed through1812 and rotary thermal feed through, for example as described withrespect to FIG. 17. The rotor 1816 of has two independent arms 1818,1820 movingly mounted thereto by respective rotary drives 1822, 1824.Rotary drives 1822, 1824 similarly have optical couplings 1826, 1828 andthermal couplings 1830, 1832. In alternate aspects, more or less arms,axes directly or remotely driven may be provided. In this embodimentheat is dissipated through a series of joints and through a series ofthermal couplings, 1830 to 1831 and 1832 to 1831 respectively. Inalternate aspects, more or less joints may be provided. For example, twoor more arms that may be operable independently in one, sonic or allaxes where each arm may have a main link driven concentric with respectto a common axis or other suitable arrangement.

Referring also to FIG. 19 there is shown a block diagram of an examplesystem 400. System 400 has vacuum chamber 402 and first and secondtransports 404, 406. Here, transport 404 is a combination linear androtary drive and may be used, for example in linear tool configuration400. Referring also to FIG. 20, there is shown system 410. System 410has vacuum chamber 412 and transports 414, 416, 418, 420. The embodimentshown is merely exemplary. Accordingly, combinations of linear robots asshown, stationary robots or otherwise having more or less axis may beprovided. For example, multiple stationary robots may be provided in oneor more transport chambers an being serviced with a single or multi axislinear shuttle incorporating features as disclosed.

Referring also to FIG. 21, there is shown a cross section of system 400.Chamber 402 has slots 430, 432 through which substrates are inserted andremoved. Transport or robot drive has drive portion 434 and arm portion436, arm portion 436 may have features as disclosed or may be a scaratype arm driven by drive portion 434. Referring also to FIG. 22, thereis shown a partial cross section of system 400. Drive 434 is shownhaving slide components 440, 442 coupled to the floor of chamber 402. Inalternate aspects, drive 434 may be coupled to an intermediate plate orotherwise. Components 440, 442 may be conventional linear slides oralternately may be magnetically suspended, noncontact slides, active,passive or otherwise. The embodiment shown does not require feedthroughs and/or service loops for motion, cooling or power for exampleand in alternate aspects may employ one or more feed through and/orservice loop. Slides 440, 442 are coupled to base or heat conductiveplate 444. Here, heat generating components of drive 434 are thermallysinked to base 444. In alternate aspects, additional heat generatingcomponents may be provided thermally sinked to base 444 or anothercomponent or not at all, for example, where a heat generating componentmay be sunk to the surroundings by radiation or otherwise. Base 44 andthe components mounted thereto traverse on slides 440, 442 toselectively access slots within chamber 402 of system 400. Power and/orcommunications may be provided with inductive coupling 446. Here,inductive coupling 446 may have base coupling 448 coupled to chamber 402and pickup 450 coupled to plate 444. Here, base coupling 448 may run allor part of the length of chamber 402 providing pickup with 450 powerand/or communications regardless of the location that drive 434 hastraversed to selectively. More or less couplings 446 may be provided inline, in parallel or otherwise serving one or more drives simultaneouslyor independently or otherwise. Alternately, any suitable couplings maybe provided, for example, as previously described, or for example,flexure based couplings for shorter distances for communication orotherwise. Base 444 is traversed by linear drive module 452 havingstationary platen 454 coupled to chamber 402, for example, the length ofthe chamber to serve one or more drive and forcer 456 coupled to base444. Here module 452 may be any suitable linear electric drive, forexample a brushless linear motor having an active platen with magnets ora passive platen without magnets or otherwise. Drive module 452 mayfurther have a position detection device that may be inductive, opticalincremental, absolute or otherwise. Here, the read head may be packagedwith or proximate to forcer 456 and the read track may be packagedproximate or with platen 454 or chamber 402. Heat may be transmittedfrom sink 458 mounted to base 444 to sink 460 mounted to chamber 402where each sink may have interleaved surfaces to form a radiationcoupling and where sink 460 may run the length of chamber 402. Drive 434has active components that may generate heat, for example motorwindings, encoder read heads, brakes, controllers and amplifiers,optical to ethercat couplings, rectifiers, power conditioners or anysuitable heat generating components or components that are sensitive toheat. Such components may be thermally coupled or thermally sinked tobase 444 such that base 444 may dissipate such heat via coupling 458,460 or otherwise. Here, such components may be encapsulated in anenclosure, potted or partially encapsulated in an enclosure such thatthermal energy may be transferred by such enclosure, potting or othersuitable structure or coupling to base 444. For example, forcer 456 isthermally sinked directly to base 444. Linear Motor 456 may have magnetsin a stationary platen, or may have a magnet-less passive platen asdescribed in U.S. Pat. No. 7,800,256 which is hereby incorporated byreference in its entirety. By way of further example, the rotary andvertical power elements of drive 434 may be enclosed and potted, forexample, as shown or otherwise to thermally sink to base 444.

In the exemplary embodiment, exemplary arm 436 may be a scare arm havingpassive components such as bands, pulleys or otherwise or activecomponents as such as encoders or motors or otherwise. The rotationaland vertical portion of drive 434 has vertical drive 462, for example alead screw drive or otherwise, and first and second rotary drives 464,466. Screw 470 drives nut 468 of drive 462 which is shown coupled toshaft 472 of rotary drive 466. Shafts 472, 472 are operably coupled toarm 436 to allow vertical movement, rotary movement and radial movement.Shafts 472, 472 are operably coupled to shafts 476, 478 of drives 466,464 by prismatic joints that resist rotation to allow transmission oftorque with freedom of vertical movement while holding the activecomponents of the lower portion of drive 434 stationary with respect tobase 444. Here, drives 462, 464, 466 may have active components, such asmotor windings 480, read heads 482, electronic components or assemblies484, brake windings 486 or other active components thermally sinked tobase 444 as described. As earlier described, high speed communicationmay be by coupling 446 or alternately optically by one or more opticalcoupling(s) 488, 490 where such couplings may interface withcorresponding coupling(s) in chamber 402 along a traversing axis ofmotion. In alternate aspects any suitable combination of modules orcomponents as described herein may be provided.

Referring now to FIG. 23, there is shown a view of drive 600 in aretracted position incorporating aspects of the disclosed embodiment.Referring also to FIG. 24, there is shown a view of drive 600 in anextended position incorporating aspects of the disclosed embodiment.Drive 600 has four radially independently moveable end effectors 602,604, 606, 608. Further, end effectors 602, 606 are linearly mounted tolinear drive 610 and end effectors 604, 608 are linearly mounted tolinear drive 612. Linear drive 610 is mounted to rotary drive 614 andlinear drive 612 is mounted to rotary drive 616 where rotary drives 614,616 are independently rotatable. Here, two processed substrates S may bepicked and two unprocessed substrates S′ may be placed where, forexample, the placed substrates may be placed simultaneously at twolocations independent of the other. Here, error corrections may becorrected on the fly and independent of each other.

Referring also to FIG. 25, there is shown a cross section of drive 600.Each of linear drives 610 and 612 has two independent linear motordriven drives respectively coupled to end effectors 602, 606 and 604,608. Linear drives 610, 612 and rotary drives 614, 616 may have featuresas shown and as disclosed herein with respect to other aspects of thedisclosed embodiments. In this example embodiment the drive 600 includeslinear motors 620 in four locations. In this example embodiment thedrive 600 includes a power coupling, a communication coupling, and alinear positions sensor unit 622 in four locations. Heat transfers 624are provided in four locations. Rotary drives 626 are provided in twolocations including position encoders and power and communicationcouplings. A communications link 628 is provided. Heat exchangers 630are provided along with a heat out exchanger 632.

Referring now to FIGS. 26-28 there are shown various views of a Linearplatform with the three link arm robots 700, 800 with each having twoend effectors 804 that are independently moveable. The robot 700 (800)is shown in a vacuum chamber 715 with process chambers 14 and load locks16. Locks 16 may be a single load lock or stacked load locks.Alternately, one or more load locks may be provided adjacent lock 16 orotherwise located. In the embodiment shown, 7 process modules 14 areshown. Alternately, more or less process modules may be provided.Process module 14 may process a single wafer or more than one wafer, forexample, with a carousel, stacked or batched wafers or stacked dependentor independent process modules. With the embodiment shown, robot 700 mayindependently access modules 14, 16 where three opposing pairs ofmodules are shown along a length on a linear platform with an opposingpair at the ends of the linear platform. Alternately more or lessmodules may be provided opposing, at the end or otherwise. Alternately,more than one platform may be connected together, for example, where oneprovides for input wafers that are subsequently processed in andtransported through more than one platform and exiting through the inputor at a distal of intermediate platform or otherwise. The dual endeffectors shown allow for a fast swap at each module, for example whereone end effector picks a processed substrate and the other then placesan unprocessed substrate. Alternately, a single end effector, more endeffectors, batch end effectors or other suitable end effector may beprovided. Although one robot 700 is shown, more than one robot may beprovided, for example, where more opposing process modules need accessor where the required through put dictates additional handling capacity.Although a three link robot is shown, any suitable robot may be providedsuch as disclosed or otherwise. For example, a dual arm robot or a robothaving more or less links or a robot having a combination of rotationaland linear links and joints may be provided. Referring also to FIGS.29-30 there are shown various views of a linear platform with a threelink arm robot 802 with dual end effectors 806 that may be fixed withrespect to each other or may alternately be independently moveable. Therobot 802 is shown in a vacuum chamber with process chambers having twosubstrates processed in each and load locks. Locks may be a single loadlock supporting two substrates or stacked load locks. Alternately, oneor more load locks may be provided adjacent or otherwise located. In theembodiment shown, process modules are shown. Alternately, more or lessprocess modules may be provided. Each process module may process twowafer or more than two wafers, for example, with a carousel, stacked orbatched wafers or stacked dependent or independent process modules. Withthe embodiment shown, robot 802 may independently access the moduleswhere three opposing pairs of modules are shown along a length on alinear platform with an opposing pair at the ends of the linearplatform. Alternately more or less modules may be provided opposing, atthe end or otherwise. Alternately, more than one platform may beconnected together, for example, where one provides for input wafersthat are subsequently processed in and transported through more than oneplatform and ex ting through the input or at a distal of intermediateplatform or otherwise. The dual end effectors shown allow picking orplacing two substrates at the same time. Alternately, an additional endeffector may be provided for a fast swap at each module, for examplewhere one end effector picks a pair of processed substrates and theother then places a pair of unprocessed substrates. Alternately, asingle end effector, more end effectors, batch end effectors or othersuitable end effector may be provided. Although one robot 800 is shown,more than one robot may be provided, for example, where more opposingprocess modules need access or where the required through put dictatesadditional handling capacity. Although a three link robot is shown, anysuitable robot may be provided such as disclosed or otherwise. Forexample, a dual arm robot or a robot having more or less links or arobot having a combination of rotational and linear links and joints mayhe provided.

In one type of example embodiment, an apparatus 25 may be providedcomprising a frame comprising at least three members including at leasttwo links 22, 24 forming a movable arm and an end effector 26, where theend effector and the links are connected by movable joints, where theend effector is configured to support a substantially planar substratethereon; a first position sensor 98 or 100 on the frame proximate afirst one of the joints, where the first position sensor is configuredto sense a position of two of the members relative to each other; and anairtight enclosure 50 on the movable arm, where the first positionsensor is sealed, at least partially, in the an airtight enclosure.

The apparatus may further comprise a drive 18 connected to the frame,where the drive is configured to move the movable arm. The apparatus mayfurther comprise a vacuum chamber 15, where the frame is located in thevacuum chamber and the drive extends through a wall in the vacuumchamber. The apparatus may further comprise a heat transfer system (seeFIG. 8 for example) at the drive, where the heat transfer system isconfigured to transfer heat from the movable are to a spaced distancefrom the movable arm. The apparatus may further comprise a controller 52and/or 54 connected to the drive and/or the first position sensor. Thefirst position sensor may be spaced from the drive. The first positionsensor may comprise a position detection encoder. The apparatus mayfurther comprise a second position sensor on the frame proximate asecond one of the Mints, where the second position sensor is configuredto sense a position of two of the members relative to each other. Theapparatus may further comprise an electrically powered actuator 48 onthe frame located, at least partially, in the airtight enclosure 50 orin a second airtight enclosure. The first position sensor may be anoptical encoder, and a fiber optic member 73B may extend from the firstposition sensor through the airtight enclosure 50. The apparatus mayfurther comprise a controller 52 on the frame and connected to theoptical encoder, where the controller 52 is located, at least partially,in the airtight enclosure 50 or in a second airtight enclosure. Theairtight enclosure may be formed, at least partially, by one of thelinks 22, 24 of the frame. The apparatus may further comprise at leastone electrical conductor 730 extending through the airtight enclosure.

The heat transfer system may comprise a first heat transfer member 146connected to a first member 1840 of the drive and a second heat transfer144, where the second heat transfer member 144 is located relative tothe first heat transfer member to receive heat therefrom, and where thefirst heat transfer member 146 is moveable relative to the second heattransfer member as the first member 1840 of the drive is moved.

The heat transfer system may comprise first pair 1830 of heat transfermembers; and a spaced second pair 1832 of heat transfer members, wherethe first pair of heat transfer members 1830 comprise a first heattransfer member 1842 connected to a first member of the drive 1844 and asecond heat transfer 1846, where the second heat transfer member 1846 islocated relative to the first heat transfer member 1842 to receive heattherefrom, and where the first heat transfer member 1842 is moveablerelative to the second heat transfer member as the first member 1844 ofthe drive is moved, where the second pair of heat transfer members 1832comprise a third heat transfer member 1848 connected to a second member1850 of the drive and a fourth heat transfer member 1852, where thefourth heat transfer member 1852 is located relative to the third heattransfer member 1848 to receive heat therefrom, and where the third heattransfer member 1848 is moveable relative to the fourth heat transfermember 1852 as the second member 1850 of the drive is moved. The heattransfer system may further comprise a third pair of heat transfermembers comprises a fifth heat transfer member 146 connected to a thirdmember 1840 of the drive and a sixth heat transfer member 144, where thesixth heat transfer member 144 is located relative to the fifth heattransfer member 146 to receive heat therefrom, and where the fifth heattransfer member 146 is moveable relative to the sixth heat transfermember 144 as the third member 1840 of the drive is moved. The secondand fourth heat transfer members 1846, 1852 may be supported on thethird member 1840 of the drive. The apparatus may be a planar substratemovement robot adapted to move a planar substrate in a vacuum chamber onthe end effector.

Another example embodiment may be provided in an apparatus 12 comprisingan electrical device 48 and/or 52 and/or 100; a frame 25 having theelectrical device thereon, where the frame comprises at least threemembers including at least two links 22, 24 forming a movable arm and anend effector 26, where the end effector and the links are connected bymovable joints, where the end effector is configured to support asubstantially planar substrate thereon; a drive 18 connected to themovable arm, where the drive is configured to move the movable arm; anda neat transfer system (see FIG. 8 for example) at the drive, where theheat transfer system is configured to transfer heat from the movable areto a spaced distance from the movable arm.

Another example embodiment may be provided in an apparatus 12 comprisinga frame comprising at least three members including at least two links22, 24 forming a movable arm and an end effector 26, where the endeffector and the links are connected by movable joints, where the endeffector is configured to support a substantially planar substratethereon; a first position sensor 100 on the frame proximate a first oneof the joints, where the first position sensor is configured to sense aposition of two of the members relative to each other; and acommunications link 73 connected to the first position sensor, where thecommunications link is configured to transmit signals from the firstposition sensor to a device spaced from the movable arm through anairtight enclosure.

The term “joint” should be considered a broad term. For example, thejoint may be a rotary joint, a prismatic joint or any other suitabletype of joint. Likewise, the terms “link” and “member” should beconsidered broad terms including multiple elements connected together.Any suitable links or members could be provided.

It should be understood that the foregoing description is onlyillustrative. Various alternatives and modifications can be devised bythose skilled in the art. For example, features recited in the variousdependent claims could be combined with each other in any suitablecombination(s). In addition, features from different embodimentsdescribed above could be selectively combined into a new embodiment.Accordingly, the description is intended to embrace all suchalternatives, modifications and variances which fall within the scope ofthe appended claims.

1-20. (canceled)
 21. An apparatus comprising: a robot arm comprising aplurality of rotatable links and an end effector configured to supportat least one substrate thereon, where the robot arm is configured to belocated in a first environment; at least one active component located onthe robot arm; an airtight enclosure on the robot arm, where the atleast one active component is located in the airtight enclosure, wherethe airtight enclosure is configured to form a second differentenvironment in the airtight enclosure to isolate the at least one activecomponent in the airtight enclosure from the second environment; and atleast one electrical conductor on the robot arm which extends throughthe airtight enclosure and is connected to the at least one activecomponent, where the airtight enclosure seals the passage of the atleast one active component through the airtight enclosure to maintainthe second environment isolated from the first environment, where the atleast one an electrical conductor has at least one limited-rotationflexure to compensate for movement of the rotatable links relative toone another, and thereby avoid damage to the at least one an electricalconductor as the rotatable links rotate relative to one another.
 22. Anapparatus as in claim 21 where the at least one limited-rotation flexurecomprises a helical coil flexure.
 23. An apparatus as in claim 21 wherethe at least one limited-rotation flexure has a first end at a firstelectrical insulator connected to a first one of the rotatable links,and an opposite second end at a second electrical insulator connected toa second one of the rotatable links.
 24. An apparatus as in claim 23where the first and second electrical insulators are at a rotary jointbetween the first and second rotatable links.
 25. An apparatus as inclaim 21 where the at least one limited-rotation flexure comprisesmultiple helical coil flexures arranged in a substantially coaxialmanner at a rotary joint between two of the rotatable links to providemultiple paths for power and/or communication signals.
 26. An apparatusas in claim 21 where the at least one limited-rotation flexure comprisesa plurality of helical coil flexures.
 27. An apparatus as in claim 26where the plurality of helical coil flexures comprise at least two ofthe helical coil flexures arranged in a substantially coaxial manner ata rotary joint between two of the rotatable links, where the at leasttwo helical coil flexures are wound in opposite directions so thatrestoring forces associated with individual ones of the at least twohelical coil flexures are balanced regardless of the displacement of therotary joint.
 28. An apparatus as in claim 26 further comprisingelectrical insulation cylinders between individual ones of the helicalcoil flexures to prevent electrical shorts between neighboring ones ofthe helical coil flexures.
 29. An apparatus as in claim 21 where the atleast one limited-rotation flexure comprises a spiral coil flexure. 30.An apparatus as in claim 29 where the at least one limited-rotationflexure has a first end which extends through a first electricalinsulator connected to a first one of the rotatable links, and anopposite second end which extends through a second electrical insulatorconnected to a second one of the rotatable links.
 31. An apparatus as inclaim 30 where the two electrical insulators are coupled at a rotaryjoint between the first and second rotatable links.
 32. An apparatus asin claim 29 where the at least one limited-rotation flexure comprisesmultiple spiral coil flexures arranged in a substantially parallelmanner at a rotary joint between the first and second rotatable links toprovide a plurality of paths for power and/or communication signals. 33.An apparatus as in claim 21 where the at least one limited-rotationflexure comprises a plurality of spiral coil flexures.
 34. An apparatusas in claim 33 where the plurality of spiral coil flexures comprise atleast two of the spiral coil flexures arranged in a substantiallystacked manner at a rotary joint between two of the rotatable links,where the at least two spiral coil flexures are wound in oppositedirections so that restoring forces associated with individual ones ofthe at least two spiral coil flexures are balanced regardless of thedisplacement of the rotary joint.
 35. An apparatus as in claim 34further comprising an electrical insulation disk between the at leasttwo spiral coil flexures to prevent electrical shorts between the spiralcoil flexures.
 36. A method comprising: locating at least one activecomponent inside an airtight enclosure; locating the airtight enclosureon a robot arm, where the robot arm comprises a plurality of rotatablelinks and an end effector configured to support at least one substratethereon, where the airtight enclosure is located on a first one of thelinks, and where the robot arm is configured to be located in a firstenvironment; sealing a passage of at least one an electrical conductorthrough the airtight enclosure, where the at least one an electricalconductor is electrically connected to the at least one active componentand the passage is sealed to maintain the second environment isolatedfrom the first environment; and providing the at least one an electricalconductor with at least one limited-rotation flexure to compensate formovement of the rotatable links relative to one another, and therebyavoid damage to the at least one an electrical conductor as therotatable links rotate relative to one another
 37. A method as in claim36 where the at least one limited-rotation flexure comprises a pluralityof helical coil flexures with a first end at a first electricalinsulator connected to a first one of the rotatable links, and anopposite second end at a second electrical insulator connected to asecond one of the rotatable links, where the first and second electricalinsulators are at a rotary joint between the first and second rotatablelinks.
 38. A method as in claim 37 where the multiple helical coilflexures are arranged in a substantially coaxial manner at a rotaryjoint between the first and second rotatable links to provide multiplepaths for power and/or communication signals, and where at least twohelical coil flexures are wound in opposite directions so that restoringforces associated with individual ones of the at least two helical coilflexures are balanced regardless of the displacement of the rotaryjoint.
 39. A method as in claim 36 where the at least onelimited-rotation flexure comprises a plurality of spiral coil flexures,where the at least one limited-rotation flexure has a first end whichextends through a first electrical insulator connected to a first one ofthe rotatable links, and an opposite second end which extends through asecond electrical insulator connected to a second one of the rotatablelinks.
 40. A method as in claim 39 where the plurality of spiral coilflexures comprise at least two of the spiral coil flexures arranged in asubstantially stacked manner at a rotary joint between two the first andsecond rotatable links, where the at least two spiral coil flexures arewound in opposite directions so that restoring forces associated withindividual ones of the at least two spiral coil flexures are balancedregardless of the displacement of the rotary joint.